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Our diaphragm-sealed valves are available in a wide variety of sizes, materials, and configurations to fill your needs for high-purity and ultrahigh-purity applications.
Diaphragm-sealed valves:
DL series and DS series diaphragm valves offer packless, all metal containment for high-purity and ultrahigh-purity applications up to 3500 psig (241 bar).
| Working Pressure | Up to 3500 psig (241 bar) |
| Temperature | –100 to 250°F (–73 to 121°C) |
| Flow Coefficient | Up to 0.30 |
| Body Material | 316L stainless steel |
| Diaphragm Material | 316 stainless steel |
| End Connections | |
| Type | Swagelok® tube fitting, VCR® face seal fitting, VCO® O-ring fitting, tube butt weld, tube socket weld |
| Size | 1/4, 3/8, and 1/2 in.; 6 and 8 mm |
With flow coefficients up to 13 and a variety of body materials and configurations, LD series bulk gas diaphragm valves can support a wide range of ultrahigh-purity shutoff, bulk-gas distribution, and isolation applications.
| Working Pressure | Up to 300 psig (20.6 bar) |
| Temperature | –20 to 300° F (–28 to 148°C) |
| Flow Coefficient | Up to 13 |
| Body Materials | CF3M cast stainless steel, forged and bar stock 316L stainless steel |
| Diaphragm Material | 316L stainless steel |
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End Connections |
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| Type | Swagelok tube fitting, male VCR face seal fitting, female NPT, female ISO, tube extension |
| Size | 1/4 to 1 in.; 12 to 25 mm |
With 316L VIM-VAR construction, DP series diaphragm-sealed valves are suitable for a variety of ultrahigh-purity applications.
| Working Pressure | Vacuum to 3045 psig (210 bar) |
| Burst Pressure | Up to 12 200 psig (840 bar) |
| Actuation Pressure | 60 to 120 psig (4.2 to 8.2 bar) |
| Temperature | –10 to 300°F (–23 to 150°C) |
| Flow Coefficient | 0.20 and 0.27 |
| Body Materials | 316L VIM-VAR stainless steel |
| Diaphragm Material | Cobalt-based superalloy |
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End Connections |
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| Type | Swagelok tube fitting, VCR face seal fitting, tube butt weld, modular surface-mount (MSM) |
| Size | 1/4 in.; 6 mm |
DF series diaphragm valves are designed for a wide range of ultrahigh-purity, high-flow applications, with a flow coefficient of 0.62 and available with high-flow end connections.
| Working Pressure | Vacuum to 300 psig (20.6 bar) |
| Burst Pressure | 3200 psig (220 bar) |
| Actuation Pressure | 70 to 100 psig (4.9 to 6.8 bar) |
| Temperature | –10 to 270°F (–23 to 132°C) |
| Flow Coefficient | 0.62 |
| Body Materials | 316L VAR stainless steel |
| Diaphragm Material | Cobalt-based superalloy |
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End Connections |
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| Type | "H" type VCR® face seal fitting, VCR face seal fitting, tube butt weld |
| Size | 1/4, 3/8, 1/2 in.; 10 and 12 mm |
ALD diaphragm valves offer ultrahigh cycle life, high-speed actuation, and flow coefficients up to 0.62, along with thermal actuators, position sensors, and solenoids for optimal performance in atomic layer deposition applications.
| Working Pressure | Vacuum to 145 psig (10.0 bar) |
| Burst Pressure | >3200 psig (220 bar) |
| Actuation Pressure | 50 to 90 psig (3.5 to 6.2 bar) |
| Temperature | 32 to 392°F (0 to 200°C) |
| Flow Coefficient | 0.27 or 0.62 |
| Body Materials | 316L VIM-VAR stainless steel |
| Diaphragm Material | Cobalt-based superalloy |
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End Connections |
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| Type | VCR face seal fitting, tube butt weld; modular surface mount (MSM) |
| Size | 1/4 to 1/2 in.; 6 to 12 mm; 1.125 and 1.5 in. MSM |
Meeting SEMI Standard F57-0301 for UHP chemical distribution systems and equipment, the DRP series' ultrahigh-purity diaphragm enhanced design helps minimize entrapment areas and extend diaphragm life.
| Pressure Rating | Up to 100 psig (6.8 bar) |
| Media Temperature | 73 to 212°F (23 to 100°C) |
| Flow Coefficient | Up to 10.2 |
| Body, Diaphragm Material | Modified PTFE |
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End Connections |
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| Type | Fine thread flare and Nippon Pillar Super 300® standard; ISO, NPT, Flowell |
| Size | 1/4 to 1 1/4 in. and 6 to 25 mm |
| Configuration | 2- and 3-way manual and pneumatic shutoff; adjustable flow and bypass models |
Swagelok thermal-immersion diaphragm valves offer high-speed actuation, flow coefficients up to 0.60, and are designed for optimum performance at 220°C (428°F) for high-temperature processes including atomic layer deposition (ALD) and precursor delivery applications. They are offered in both pneumatically actuated and manual models with a variety of 1/4 and 3/8 in. end connections.
| Working Pressure | Vacuum to 70 psig (4.8 bar) |
| Burst Pressure | > 3200 psig (220 bar) |
| Actuation Pressure | 60 to 90 psig (4.1 to 6.2 bar) |
| Temperature | 20 to 220°C (70 to 428°F) |
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Flow Coefficient |
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| "H" type VCR® Connections | 0.60 at 20°C (70°F) |
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0.40 at 220°C (428°F) |
| VCR and all other connections |
0.30 at 20°C (70°F) 0.21 at 220°C (428°F) |
| Modular surface-mount body |
0.25 at 20°C (70°F) 0.21 at 220°C (428°F) |
| Body Material | 316L VIM-VAR stainless steel |
| Diaphragm Material | Cobalt-based superalloy |
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End Connections |
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| Type | VCR and "H" type VCR metal gasket face seal fittings, tube butt weld; modular surface mount (MSM) |
| Size |
1/4 and 3/8 in. 1.125 and 1.5 in. MSM |
The DR series radial diaphragm valve offers a cleaner, more compact way to manage sterile flow streams for many applications: media preparation, fermentation, harvest, separation, refining, purification, CIP, and SIP systems. The single-body biopharm valve design can be manufactured in a wide range of configurations to include multiple valves and multiple ports, and point-of-use valves.
| Working Pressure | Up to 150 psig (10.3 bar) |
| Media Temperature | Up to 280°F (137°C) |
| Flow Coefficient | 1.6 to 27.2 |
| Body Material | 316L stainless steel |
| Diaphragm Material | Modified PTFE |
| Internal Surface Finish | Electropolished and finished to 15 µin. (0.38 µm) avg |
| Valve Sizes | 1/2 to 2 in. |
| End Connections | Tube butt weld, TS series sanitary clamp, and Kwik-Clamp |
DE series springless diaphragm valves are available with a variety of actuation options for ease of integration into your 1.125 in. C-seal or W-seal modular gas system.
| Working Pressure | Vacuum to 125 psig (8.6 bar) |
| Burst Pressure | >3200 psig (220 bar) |
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Actuation Pressure |
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| Normally Closed | 60 to 120 psig (4.1 to 8.2 bar) |
| Normally Open and | 60 to 90 psig (4.1 to 6.2 bar) |
| Normally Closed with manual |
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| Integral lockout override |
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| Temperature | 14 to 150°F (-10 to 65°C) |
| Flow Coefficient | 0.3 |
| Body Materials | 316L VIM-VAR stainless steel |
| Diaphragm Material | Cobalt-based superalloy |
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End Connections |
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| Type | 1.125 in. modular surface mount (MSM) |
| Configurations | 2-port and 3-port |
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"Safe Product Selection: The complete catalog contents must be reviewed to ensure that the system designer and user make a safe product selection. When selecting products, the total system design must be considered to ensure safe, trouble-free performance. Function, material compatibility, adequate ratings, proper installation, operation, and maintenance are the responsibilities of the system designer and user.
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